Vacuum deposition materials (Optical thin film materials) / Spattering target


Oxide Materials

Al2O3, CeO2, Cr2O3, HfO2, ITO, La2O3, MgO, Nb2O5, NiO,
SiO2, Ta2O5, TiO, TiO2, Ti3O5, Y2O3, WO3, ZrO2, ZrO2+α, etc.

  • Sintering granule : 0.5-1.5mm, 1-3mm, 2-5mm, etc.
  • Sintering molding : Pellet-shaped, Disk-shaped, Arch-shaped, etc.
Fluoride Materials

AlF3, CaF3, CeF3, GdF3, LaF3, LiF, MgF2, NdF3, YF3, etc.

  • Sintering granule : 1-3mm, etc.
  • Sintering molding : Pellet-shaped, etc.
Sulfide Materials
  • Sintering granule : 1-3mm, 3-8 mm, etc.
  • Sintering molding : Pellet-shaped, etc.

We can customize various type of materials, size and shape, please feel free to contact us.


Quartz (SiO2) Ring


Click Here! for characteristics of each kind material


Metal Materials

Ag, Al, Au, Cr, Ge, In, Ni, Pt, Si, Ta, Ti, Zr, every kind of alloy, etc.

  • Chunk-shaped, Wire-cut shaped,  Squamous, Bulk , Pellet-shaped, Disk- shaped, etc.
Example for Matel material (Granule)
Spattering Target
  • Material:  Pure metals, every kind of alloy, Oxide, Oxide mixture, Fluoride, Nitride, etc.

  • Shape:   Round, Angle, Cylindrical, etc.
  • We also support Bonding process & Backing plate making.