Vacuum deposition materials (Optical thin film materials) / Spattering target

 

Oxide Materials

Al2O3, CeO2, Cr2O3, HfO2, ITO, La2O3, MgO, Nb2O5, NiO,
SiO2, Ta2O5, TiO, TiO2, Ti3O5, Y2O3, WO3, ZrO2, ZrO2+α, etc.

  • Sintering granule : 0.5-1.5mm, 1-3mm, 2-5mm, etc.
  • Sintering molding : Pellet-shaped, Disk-shaped, Arch-shaped, etc.
 
Fluoride Materials

AlF3, CaF3, CeF3, GdF3, LaF3, LiF, MgF2, NdF3, YF3, etc.

  • Sintering granule : 1-3mm, etc.
  • Sintering molding : Pellet-shaped, etc.
 
Sulfide Materials
ZnS
  • Sintering granule : 1-3mm, 3-8 mm, etc.
  • Sintering molding : Pellet-shaped, etc.
 
Others

We can customize various type of materials, size and shape, please feel free to contact us.

 

Quartz (SiO2) Ring

 

Click Here! for characteristics of each kind material

 

Metal Materials

Ag, Al, Au, Cr, Ge, In, Ni, Pt, Si, Ta, Ti, Zr, every kind of alloy, etc.

  • Chunk-shaped, Wire-cut shaped,  Squamous, Bulk , Pellet-shaped, Disk- shaped, etc.
 
Example for Matel material (Granule)
 
Spattering Target
  • Material:  Pure metals, every kind of alloy, Oxide, Oxide mixture, Fluoride, Nitride, etc.

  • Shape:   Round, Angle, Cylindrical, etc.
  • We also support Bonding process & Backing plate making.
 
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